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1 Publication


2004 | Book Chapter | LibreCat-ID: 39850
U. Hilleringmann, “Ätztechnik,” in Silizium-Halbleitertechnologie, Wiesbaden: Vieweg+Teubner Verlag, 2004, pp. 65–90.
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isbn=978-3-322-94072-8

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Citation Style: IEEE

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