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1 Publication
2004 | Book Chapter | LibreCat-ID: 39850
Hilleringmann, Ulrich. “Ätztechnik.” Silizium-Halbleitertechnologie, Vieweg+Teubner Verlag, 2004, pp. 65–90, doi:10.1007/978-3-322-94072-8_5.
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