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1 Publication
2004 | Book Chapter | LibreCat-ID: 39850
Hilleringmann, U. (2004). Ätztechnik. In Silizium-Halbleitertechnologie (pp. 65–90). Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-94072-8_5
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