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18 Publications
2002 | Journal Article | LibreCat-ID: 39882
Mankowski, V., Ulrich Hilleringmann, and K. Schumacher. “A Novel Insulation Technique for Smart Power Switching Devices and Very High Voltage ICs above 10 KV.” Microelectronic Engineering 53, no. 1–4 (2002): 525–28. https://doi.org/10.1016/s0167-9317(00)00370-1.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39879
Horstmann, J.T., Ulrich Hilleringmann, and K. Goser. “1/f-Noise of Sub-100 Nm-MOS-Transistors Fabricated by a Special Deposition and Etchback Technique.” Microelectronic Engineering 53, no. 1–4 (2002): 213–16. https://doi.org/10.1016/s0167-9317(00)00299-9.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39919
Hilleringmann, Ulrich, K. Knospe, C. Heite, K. Schumacher, and K. Goser. “A Silicon Based Technology for Monolithic Integration of Waveguides and VLSI CMOS Circuits.” Microelectronic Engineering 15, no. 1–4 (2002): 289–92. https://doi.org/10.1016/0167-9317(91)90231-2.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39920
Soennecken, A., Ulrich Hilleringmann, and K. Goser. “Floating Gate Structures as Nonvolatile Analog Memory Cells in 1.0μm-LOCOS-CMOS Technology with PZT Dielectrica.” Microelectronic Engineering 15, no. 1–4 (2002): 633–36. https://doi.org/10.1016/0167-9317(91)90299-s.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39915
Hilleringmann, Ulrich, and K. Goser. “Results of Monolithic Integration of Optical Waveguides, Photodiodes and CMOS Circuits on Silicon.” Microelectronic Engineering 19, no. 1–4 (2002): 211–14. https://doi.org/10.1016/0167-9317(92)90425-q.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39916
Adams, S., Ulrich Hilleringmann, and K. Goser. “CMOS Compatible Micromachining by Dry Silicon-Etching Techniques.” Microelectronic Engineering 19, no. 1–4 (2002): 191–94. https://doi.org/10.1016/0167-9317(92)90420-v.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39889
Mankowski, V., Ulrich Hilleringmann, and K. Schumacher. “12 KV Low Current Cascaded Light Triggered Switch on One Silicon Chip.” Microelectronic Engineering 46, no. 1–4 (2002): 413–17. https://doi.org/10.1016/s0167-9317(99)00122-7.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39877
Hilleringmann, Ulrich, T. Vieregge, and J.T. Horstmann. “A Structure Definition Technique for 25 Nm Lines of Silicon and Related Materials.” Microelectronic Engineering 53, no. 1–4 (2002): 569–72. https://doi.org/10.1016/s0167-9317(00)00380-4.
LibreCat
| DOI