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2 Publications
2012 | Journal Article | LibreCat-ID: 39520
Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering. 2012;22(12). doi:10.1088/0960-1317/22/12/125012
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 39522
Brockmeier A, Rodriguez FJS, Harrison M, Hilleringmann U. Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering. 2012;22(12). doi:10.1088/0960-1317/22/12/125012
LibreCat
| DOI