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2 Publications


2012 | Journal Article | LibreCat-ID: 39520
Surface tension and its role for vertical wet etching of silicon
A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of Micromechanics and Microengineering 22 (2012).
LibreCat | DOI
 

2012 | Journal Article | LibreCat-ID: 39522
Surface tension and its role for vertical wet etching of silicon
A. Brockmeier, F.J.S. Rodriguez, M. Harrison, U. Hilleringmann, Journal of Micromechanics and Microengineering 22 (2012).
LibreCat | DOI
 

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