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2 Publications
2012 | Journal Article | LibreCat-ID: 39520
Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” Journal of Micromechanics and Microengineering, vol. 22, no. 12, 125012, IOP Publishing, 2012, doi:10.1088/0960-1317/22/12/125012.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 39522
Brockmeier, A., et al. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” Journal of Micromechanics and Microengineering, vol. 22, no. 12, 125012, IOP Publishing, 2012, doi:10.1088/0960-1317/22/12/125012.
LibreCat
| DOI