Please note that LibreCat no longer supports Internet Explorer versions 8 or 9 (or earlier).
We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.
2 Publications
2012 | Journal Article | LibreCat-ID: 39520
Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” Journal of Micromechanics and Microengineering 22, no. 12 (2012). https://doi.org/10.1088/0960-1317/22/12/125012.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 39522
Brockmeier, A, F J Santos Rodriguez, M Harrison, and Ulrich Hilleringmann. “Surface Tension and Its Role for Vertical Wet Etching of Silicon.” Journal of Micromechanics and Microengineering 22, no. 12 (2012). https://doi.org/10.1088/0960-1317/22/12/125012.
LibreCat
| DOI