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2 Publications
2012 | Journal Article | LibreCat-ID: 39520
A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,” Journal of Micromechanics and Microengineering, vol. 22, no. 12, Art. no. 125012, 2012, doi: 10.1088/0960-1317/22/12/125012.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 39522
A. Brockmeier, F. J. S. Rodriguez, M. Harrison, and U. Hilleringmann, “Surface tension and its role for vertical wet etching of silicon,” Journal of Micromechanics and Microengineering, vol. 22, no. 12, Art. no. 125012, 2012, doi: 10.1088/0960-1317/22/12/125012.
LibreCat
| DOI