Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation
X. Xie, T. de los Arcos, G. Grundmeier, Plasma Processes and Polymers 19 (2022).
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Journal Article
| Published
| English
Author
Xie, Xiaofan;
de los Arcos, Teresa;
Grundmeier, GuidoLibreCat
Department
Publishing Year
Journal Title
Plasma Processes and Polymers
Volume
19
Issue
11
Article Number
2200052
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Xie X, de los Arcos T, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers. 2022;19(11). doi:10.1002/ppap.202200052
Xie, X., de los Arcos, T., & Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052. https://doi.org/10.1002/ppap.202200052
@article{Xie_de los Arcos_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={10.1002/ppap.202200052}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos, Teresa and Grundmeier, Guido}, year={2022} }
Xie, Xiaofan, Teresa de los Arcos, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” Plasma Processes and Polymers 19, no. 11 (2022). https://doi.org/10.1002/ppap.202200052.
X. Xie, T. de los Arcos, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” Plasma Processes and Polymers, vol. 19, no. 11, Art. no. 2200052, 2022, doi: 10.1002/ppap.202200052.
Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” Plasma Processes and Polymers, vol. 19, no. 11, 2200052, Wiley, 2022, doi:10.1002/ppap.202200052.
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