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308 Publications
2013 | Journal Article | LibreCat-ID: 22595
J. Winter, A. Hecimovic, M. T. de los Arcos de Pedro, M. Böke, and V. Schulz-von der Gathen, “Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity,” Journal of Physics D: Applied Physics, Art. no. 084007, 2013, doi: 10.1088/0022-3727/46/8/084007.
LibreCat
| DOI
2013 | Journal Article | LibreCat-ID: 22592
K. Rügner, R. Reuter, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure,” Plasma Processes and Polymers, pp. 1061–1073, 2013, doi: 10.1002/ppap.201300059.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 22597
M. Banerjee et al., “Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors,” Crystal Growth & Design, pp. 5079–5089, 2012, doi: 10.1021/cg3010147.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 22602
A. P. Milanov et al., “Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors,” Dalton Transactions, Art. no. 13936, 2012, doi: 10.1039/c2dt31219k.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 22604
R. Reuter, K. Rügner, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure,” Plasma Processes and Polymers, pp. 1116–1124, 2012, doi: 10.1002/ppap.201100146.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 22599
A. P. Ehiasarian et al., “High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization,” Applied Physics Letters, Art. no. 114101, 2012, doi: 10.1063/1.3692172.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 22601
L. Marot et al., “Nanocomposites of carbon nanotubes embedded in a (Ti,Al)N coated film,” Surface and Coatings Technology, pp. 223–228, 2012, doi: 10.1016/j.surfcoat.2012.09.053.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 22603
M. Prenzel, M. T. de los Arcos de Pedro, A. Kortmann, J. Winter, and A. von Keudell, “Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films,” Journal of Applied Physics, Art. no. 103306, 2012, doi: 10.1063/1.4767383.
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 22600
A. Hecimovic, M. T. de los Arcos de Pedro, V. Schulz-von der Gathen, M. Böke, and J. Winter, “Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma discharges,” Plasma Sources Science and Technology, Art. no. 035017, 2012, doi: 10.1088/0963-0252/21/3/035017.
LibreCat
| DOI