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3 Publications
2018 | Book | LibreCat-ID: 39898
@book{Hilleringmann_2018, place={Wiesbaden}, title={Silizium-Halbleitertechnologie}, DOI={10.1007/978-3-658-23444-7}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2018} }
LibreCat
| DOI
2018 | Book Chapter | LibreCat-ID: 39428
@inbook{Hilleringmann_2018, place={Wiesbaden}, title={Ätztechnik}, DOI={10.1007/978-3-658-23444-7_5}, booktitle={Silizium-Halbleitertechnologie}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2018} }
LibreCat
| DOI
2018 | Book Chapter | LibreCat-ID: 39429
@inbook{Hilleringmann_2018, place={Wiesbaden}, title={Oxidation des Siliziums}, DOI={10.1007/978-3-658-23444-7_3}, booktitle={Silizium-Halbleitertechnologie}, publisher={Springer Fachmedien Wiesbaden}, author={Hilleringmann, Ulrich}, year={2018} }
LibreCat
| DOI