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3 Publications


2018 | Book | LibreCat-ID: 39898
U. Hilleringmann, Silizium-Halbleitertechnologie. Wiesbaden: Springer Fachmedien Wiesbaden, 2018.
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2018 | Book Chapter | LibreCat-ID: 39428
U. Hilleringmann, “Ätztechnik,” in Silizium-Halbleitertechnologie, Wiesbaden: Springer Fachmedien Wiesbaden, 2018.
LibreCat | DOI
 

2018 | Book Chapter | LibreCat-ID: 39429
U. Hilleringmann, “Oxidation des Siliziums,” in Silizium-Halbleitertechnologie, Wiesbaden: Springer Fachmedien Wiesbaden, 2018.
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