Please note that LibreCat no longer supports Internet Explorer versions 8 or 9 (or earlier).

We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.

1 Publication


2015 | Journal Article | LibreCat-ID: 39495
Hilleringmann, Ulrich, F. Assion, F. F. Vidor, and G. I. Wirth. “Nanometer Scale Electronic Device Integration Using Side-Wall Deposition and Etch-Back Technology.” Journal of Machine to Machine Communications 1, no. 3 (2015): 197–214. https://doi.org/10.13052/jmmc2246-137x.131.
LibreCat | DOI
 

Filters and Search Terms

issn=2246-137X

Search

Filter Publications

Display / Sort

Citation Style: Chicago

Export / Embed