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99 Publications
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2014 | Journal Article | LibreCat-ID: 22590
Nanostructured Er2O3 Thin Films Grown by Metalorganic Chemical Vapour Deposition
K. Xu, V.-S. Dang, A. Ney, M.T. de los Arcos de Pedro, A. Devi, Journal of Nanoscience and Nanotechnology (2014) 5095–5102.
LibreCat
| DOI
K. Xu, V.-S. Dang, A. Ney, M.T. de los Arcos de Pedro, A. Devi, Journal of Nanoscience and Nanotechnology (2014) 5095–5102.
2013 | Journal Article | LibreCat-ID: 22584
Electrical and optical properties of TiO2thin films prepared by plasma-enhanced atomic layer deposition
V.-S. Dang, H. Parala, J.H. Kim, K. Xu, N.B. Srinivasan, E. Edengeiser, M. Havenith, A.D. Wieck, M.T. de los Arcos de Pedro, Roland.A. Fischer, A. Devi, Physica Status Solidi (a) (2013) 416–424.
LibreCat
| DOI
V.-S. Dang, H. Parala, J.H. Kim, K. Xu, N.B. Srinivasan, E. Edengeiser, M. Havenith, A.D. Wieck, M.T. de los Arcos de Pedro, Roland.A. Fischer, A. Devi, Physica Status Solidi (a) (2013) 416–424.
2013 | Journal Article | LibreCat-ID: 22589
MOCVD of tungsten nitride thin films: Comparison of precursor performance and film characteristics
N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, D. Rogalla, H.-W. Becker, A. Devi, R.A. Fischer, Physica Status Solidi (a) (2013) 260–266.
LibreCat
| DOI
N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, D. Rogalla, H.-W. Becker, A. Devi, R.A. Fischer, Physica Status Solidi (a) (2013) 260–266.
2013 | Journal Article | LibreCat-ID: 22596
Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties
K. Xu, A.R. Chaudhuri, H. Parala, D. Schwendt, M.T. de los Arcos de Pedro, H.J. Osten, A. Devi, Journal of Materials Chemistry C (2013).
LibreCat
| DOI
K. Xu, A.R. Chaudhuri, H. Parala, D. Schwendt, M.T. de los Arcos de Pedro, H.J. Osten, A. Devi, Journal of Materials Chemistry C (2013).
2013 | Journal Article | LibreCat-ID: 22593
Transition metal nitride thin films grown by MOCVD using amidinato based complexes [M(NtBu)2{(iPrN)2CMe}2] (M=Mo, W) as precursors
N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, V. Gwildies, M. Krasnopolski, H.-W. Becker, D. Rogalla, A. Devi, R.A. Fischer, Surface and Coatings Technology (2013) 130–136.
LibreCat
| DOI
N.B. Srinivasan, T.B. Thiede, M.T. de los Arcos de Pedro, V. Gwildies, M. Krasnopolski, H.-W. Becker, D. Rogalla, A. Devi, R.A. Fischer, Surface and Coatings Technology (2013) 130–136.
2013 | Journal Article | LibreCat-ID: 22594
Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum
A. Will, M.T. de los Arcos de Pedro, C. Corbella, A. Hecimovic, P.D. Machura, J. Winter, A. von Keudell, Journal of Physics D: Applied Physics (2013).
LibreCat
| DOI
A. Will, M.T. de los Arcos de Pedro, C. Corbella, A. Hecimovic, P.D. Machura, J. Winter, A. von Keudell, Journal of Physics D: Applied Physics (2013).
2013 | Journal Article | LibreCat-ID: 22591
Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces
C. Corbella, S. Grosse-Kreul, O. Kreiter, M.T. de los Arcos de Pedro, J. Benedikt, A. von Keudell, Review of Scientific Instruments (2013).
LibreCat
| DOI
C. Corbella, S. Grosse-Kreul, O. Kreiter, M.T. de los Arcos de Pedro, J. Benedikt, A. von Keudell, Review of Scientific Instruments (2013).
2013 | Journal Article | LibreCat-ID: 22595
Instabilities in high-power impulse magnetron plasmas: from stochasticity to periodicity
J. Winter, A. Hecimovic, M.T. de los Arcos de Pedro, M. Böke, V. Schulz-von der Gathen, Journal of Physics D: Applied Physics (2013).
LibreCat
| DOI
J. Winter, A. Hecimovic, M.T. de los Arcos de Pedro, M. Böke, V. Schulz-von der Gathen, Journal of Physics D: Applied Physics (2013).
2013 | Journal Article | LibreCat-ID: 22592
Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure
K. Rügner, R. Reuter, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073.
LibreCat
| DOI
K. Rügner, R. Reuter, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2013) 1061–1073.
2012 | Journal Article | LibreCat-ID: 22597
Fabrication of ZrO2 and ZrN Films by Metalorganic Chemical Vapor Deposition Employing New Zr Precursors
M. Banerjee, N.B. Srinivasan, H. Zhu, S.J. Kim, K. Xu, M. Winter, H.-W. Becker, D. Rogalla, M.T. de los Arcos de Pedro, D. Bekermann, D. Barreca, R.A. Fischer, A. Devi, Crystal Growth & Design (2012) 5079–5089.
LibreCat
| DOI
M. Banerjee, N.B. Srinivasan, H. Zhu, S.J. Kim, K. Xu, M. Winter, H.-W. Becker, D. Rogalla, M.T. de los Arcos de Pedro, D. Bekermann, D. Barreca, R.A. Fischer, A. Devi, Crystal Growth & Design (2012) 5079–5089.
2012 | Journal Article | LibreCat-ID: 22602
Sc2O3, Er2O3, and Y2O3 thin films by MOCVD from volatile guanidinate class of rare-earth precursors
A.P. Milanov, K. Xu, S. Cwik, H. Parala, M.T. de los Arcos de Pedro, H.-W. Becker, D. Rogalla, R. Cross, S. Paul, A. Devi, Dalton Transactions (2012).
LibreCat
| DOI
A.P. Milanov, K. Xu, S. Cwik, H. Parala, M.T. de los Arcos de Pedro, H.-W. Becker, D. Rogalla, R. Cross, S. Paul, A. Devi, Dalton Transactions (2012).
2012 | Journal Article | LibreCat-ID: 22604
The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.
LibreCat
| DOI
R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.
2012 | Journal Article | LibreCat-ID: 22599
High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
A.P. Ehiasarian, A. Hecimovic, M.T. de los Arcos de Pedro, R. New, V. Schulz-von der Gathen, M. Böke, J. Winter, Applied Physics Letters (2012).
LibreCat
| DOI
A.P. Ehiasarian, A. Hecimovic, M.T. de los Arcos de Pedro, R. New, V. Schulz-von der Gathen, M. Böke, J. Winter, Applied Physics Letters (2012).
2012 | Journal Article | LibreCat-ID: 22601
Nanocomposites of carbon nanotubes embedded in a (Ti,Al)N coated film
L. Marot, M.T. de los Arcos de Pedro, A.M. Bünzli, C. Wäckerlin, R. Steiner, P. Oelhafen, E. Meyer, D. Mathys, P. Spätig, G. Covarel, Surface and Coatings Technology (2012) 223–228.
LibreCat
| DOI
L. Marot, M.T. de los Arcos de Pedro, A.M. Bünzli, C. Wäckerlin, R. Steiner, P. Oelhafen, E. Meyer, D. Mathys, P. Spätig, G. Covarel, Surface and Coatings Technology (2012) 223–228.
2012 | Journal Article | LibreCat-ID: 22603
Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films
M. Prenzel, M.T. de los Arcos de Pedro, A. Kortmann, J. Winter, A. von Keudell, Journal of Applied Physics (2012).
LibreCat
| DOI
M. Prenzel, M.T. de los Arcos de Pedro, A. Kortmann, J. Winter, A. von Keudell, Journal of Applied Physics (2012).
2012 | Journal Article | LibreCat-ID: 22600
Temporal evolution of the radial plasma emissivity profile in HIPIMS plasma discharges
A. Hecimovic, M.T. de los Arcos de Pedro, V. Schulz-von der Gathen, M. Böke, J. Winter, Plasma Sources Science and Technology (2012).
LibreCat
| DOI
A. Hecimovic, M.T. de los Arcos de Pedro, V. Schulz-von der Gathen, M. Böke, J. Winter, Plasma Sources Science and Technology (2012).
2012 | Journal Article | LibreCat-ID: 22605
Influence of target surfaces on the atomic oxygen distribution in the effluent of a micro-scaled atmospheric pressure plasma jet
D. Schröder, H. Bahre, N. Knake, J. Winter, M.T. de los Arcos de Pedro, V. Schulz-von der Gathen, Plasma Sources Science and Technology (2012).
LibreCat
| DOI
D. Schröder, H. Bahre, N. Knake, J. Winter, M.T. de los Arcos de Pedro, V. Schulz-von der Gathen, Plasma Sources Science and Technology (2012).
2011 | Journal Article | LibreCat-ID: 22609
Liquid-Phase Epitaxy of Multicomponent Layer-Based Porous Coordination Polymer Thin Films of [M(L)(P)0.5] Type: Importance of Deposition Sequence on the Oriented Growth
D. Zacher, K. Yusenko, A. Bétard, S. Henke, M. Molon, T. Ladnorg, O. Shekhah, B. Schüpbach, M.T. de los Arcos de Pedro, M. Krasnopolski, M. Meilikhov, J. Winter, A. Terfort, C. Wöll, R.A. Fischer, Chemistry - A European Journal (2011) 1448–1455.
LibreCat
| DOI
D. Zacher, K. Yusenko, A. Bétard, S. Henke, M. Molon, T. Ladnorg, O. Shekhah, B. Schüpbach, M.T. de los Arcos de Pedro, M. Krasnopolski, M. Meilikhov, J. Winter, A. Terfort, C. Wöll, R.A. Fischer, Chemistry - A European Journal (2011) 1448–1455.
2011 | Journal Article | LibreCat-ID: 22598
Influence of process parameters on the crystallinity, morphology and composition of tungsten oxide-based thin films grown by metalorganic chemical vapor deposition
M.T. de los Arcos de Pedro, S. Cwik, A.P. Milanov, V. Gwildies, H. Parala, T. Wagner, A. Birkner, D. Rogalla, H.-W. Becker, J. Winter, A. Ludwig, R.A. Fischer, A. Devi, Thin Solid Films (2011) 11–16.
LibreCat
| DOI
M.T. de los Arcos de Pedro, S. Cwik, A.P. Milanov, V. Gwildies, H. Parala, T. Wagner, A. Birkner, D. Rogalla, H.-W. Becker, J. Winter, A. Ludwig, R.A. Fischer, A. Devi, Thin Solid Films (2011) 11–16.
2011 | Journal Article | LibreCat-ID: 22608
Evaluation of Homoleptic Guanidinate and Amidinate Complexes of Gadolinium and Dysprosium for MOCVD of Rare-Earth Nitride Thin Films
T.B. Thiede, M. Krasnopolski, A.P. Milanov, M.T. de los Arcos de Pedro, A. Ney, H.-W. Becker, D. Rogalla, J. Winter, A. Devi, R.A. Fischer, Chemistry of Materials (2011) 1430–1440.
LibreCat
| DOI
T.B. Thiede, M. Krasnopolski, A.P. Milanov, M.T. de los Arcos de Pedro, A. Ney, H.-W. Becker, D. Rogalla, J. Winter, A. Devi, R.A. Fischer, Chemistry of Materials (2011) 1430–1440.
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