Please note that LibreCat no longer supports Internet Explorer versions 8 or 9 (or earlier).
We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.
199 Publications
2002 | Journal Article | LibreCat-ID: 39876
Otterbach, R., Hilleringmann, U., Horstmann, T. J., & Goser, K. (2002). Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications. Diamond and Related Materials, 10(3–7), 511–514. https://doi.org/10.1016/s0925-9635(01)00373-9
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39877
Hilleringmann, U., Vieregge, T., & Horstmann, J. T. (2002). A structure definition technique for 25 nm lines of silicon and related materials. Microelectronic Engineering, 53(1–4), 569–572. https://doi.org/10.1016/s0167-9317(00)00380-4
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39874
Otterbach, R., & Hilleringmann, U. (2002). Reactive ion etching of CVD-diamond for piezoresistive pressure sensors. Diamond and Related Materials, 11(3–6), 841–844. https://doi.org/10.1016/s0925-9635(01)00703-8
LibreCat
| DOI
2002 | Book Chapter | LibreCat-ID: 39875
Hilleringmann, U. (2002). Metallisierung und Kontakte. In Silizium-Halbleitertechnologie (pp. 131–151). Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-94119-0_8
LibreCat
| DOI
2000 | Conference Paper | LibreCat-ID: 39884
Hilleringmann, U., Vieregge, T., & Horstmann, J. (2000). Nanometer Scale Lateral Structures of MOS Type Layers. Proceedings Micro. Tec, 49–53.
LibreCat
1999 | Conference Paper | LibreCat-ID: 39890
Otterbach, R., & Hilleringmann, U. (1999). High rate CVD-diamond etching for high temperature pressure sensor applications. 29th European Solid-State Device Research Conference, 1, 320–323.
LibreCat
1998 | Conference Paper | LibreCat-ID: 39893
Horstmann, J. T., Hilleringmann, U., & Goser, K. (1998). Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 nm MOS-Transistors. 28th European Solid-State Device Research Conference, 512–515.
LibreCat
1997 | Journal Article | LibreCat-ID: 39896
Heinrich, L. M. H., Muller, J., Hilleringmann, U., Goser, K. F., Holmes, A., Hwang, D.-H., & Stern, R. (1997). CMOS-compatible organic light-emitting diodes. IEEE Transactions on Electron Devices, 44(8), 1249–1252. https://doi.org/10.1109/16.605463
LibreCat
| DOI
1996 | Conference Paper | LibreCat-ID: 39902
Muller, J., Wirth, G., Hilleringmann, U., & Goser, K. (1996). Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission. ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 947–950.
LibreCat
1996 | Conference Paper | LibreCat-ID: 39900
Horstmann, J. T., Hilleringmann, U., & Goser, K. (1996). Characterization and Matching Analysis of 50 nm-NMOS-Transistors. ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 253–256.
LibreCat