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199 Publications
2002 | Journal Article | LibreCat-ID: 39876
Otterbach, R., et al. “Structures with a Minimum Feature Size of Less than 100 Nm in CVD-Diamond for Sensor Applications.” Diamond and Related Materials, vol. 10, no. 3–7, Elsevier BV, 2002, pp. 511–14, doi:10.1016/s0925-9635(01)00373-9.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39877
Hilleringmann, Ulrich, et al. “A Structure Definition Technique for 25 Nm Lines of Silicon and Related Materials.” Microelectronic Engineering, vol. 53, no. 1–4, Elsevier BV, 2002, pp. 569–72, doi:10.1016/s0167-9317(00)00380-4.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39874
Otterbach, R., and Ulrich Hilleringmann. “Reactive Ion Etching of CVD-Diamond for Piezoresistive Pressure Sensors.” Diamond and Related Materials, vol. 11, no. 3–6, Elsevier BV, 2002, pp. 841–44, doi:10.1016/s0925-9635(01)00703-8.
LibreCat
| DOI
2002 | Book Chapter | LibreCat-ID: 39875
Hilleringmann, Ulrich. “Metallisierung Und Kontakte.” Silizium-Halbleitertechnologie, Vieweg+Teubner Verlag, 2002, pp. 131–151, doi:10.1007/978-3-322-94119-0_8.
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| DOI
2000 | Conference Paper | LibreCat-ID: 39884
Hilleringmann, Ulrich, et al. “Nanometer Scale Lateral Structures of MOS Type Layers.” Proceedings Micro. Tec, 2000, pp. 49–53.
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1999 | Conference Paper | LibreCat-ID: 39890
Otterbach, R., and Ulrich Hilleringmann. “High Rate CVD-Diamond Etching for High Temperature Pressure Sensor Applications.” 29th European Solid-State Device Research Conference, vol. 1, 1999, pp. 320–23.
LibreCat
1998 | Conference Paper | LibreCat-ID: 39893
Horstmann, J. T., et al. “Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 Nm MOS-Transistors.” 28th European Solid-State Device Research Conference, 1998, pp. 512–15.
LibreCat
1997 | Journal Article | LibreCat-ID: 39896
Heinrich, L. M. H., et al. “CMOS-Compatible Organic Light-Emitting Diodes.” IEEE Transactions on Electron Devices, vol. 44, no. 8, 1997, pp. 1249–52, doi:10.1109/16.605463.
LibreCat
| DOI
1996 | Conference Paper | LibreCat-ID: 39902
Muller, J., et al. “Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission.” ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 947–50.
LibreCat
1996 | Conference Paper | LibreCat-ID: 39900
Horstmann, J. T., et al. “Characterization and Matching Analysis of 50 Nm-NMOS-Transistors.” ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 253–56.
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