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199 Publications
2002 | Journal Article | LibreCat-ID: 39876
R. Otterbach, U. Hilleringmann, T. J. Horstmann, and K. Goser, “Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications,” Diamond and Related Materials, vol. 10, no. 3–7, pp. 511–514, 2002, doi: 10.1016/s0925-9635(01)00373-9.
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| DOI
2002 | Journal Article | LibreCat-ID: 39877
U. Hilleringmann, T. Vieregge, and J. T. Horstmann, “A structure definition technique for 25 nm lines of silicon and related materials,” Microelectronic Engineering, vol. 53, no. 1–4, pp. 569–572, 2002, doi: 10.1016/s0167-9317(00)00380-4.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39874
R. Otterbach and U. Hilleringmann, “Reactive ion etching of CVD-diamond for piezoresistive pressure sensors,” Diamond and Related Materials, vol. 11, no. 3–6, pp. 841–844, 2002, doi: 10.1016/s0925-9635(01)00703-8.
LibreCat
| DOI
2000 | Conference Paper | LibreCat-ID: 39884
U. Hilleringmann, T. Vieregge, and J. Horstmann, “Nanometer Scale Lateral Structures of MOS Type Layers,” in Proceedings Micro. tec, 2000, pp. 49–53.
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1999 | Conference Paper | LibreCat-ID: 39890
R. Otterbach and U. Hilleringmann, “High rate CVD-diamond etching for high temperature pressure sensor applications,” in 29th European Solid-State Device Research Conference, 1999, vol. 1, pp. 320–323.
LibreCat
1998 | Conference Paper | LibreCat-ID: 39893
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 nm MOS-Transistors,” in 28th European Solid-State Device Research Conference, 1998, pp. 512–515.
LibreCat
1997 | Journal Article | LibreCat-ID: 39896
L. M. H. Heinrich et al., “CMOS-compatible organic light-emitting diodes,” IEEE Transactions on Electron Devices, vol. 44, no. 8, pp. 1249–1252, 1997, doi: 10.1109/16.605463.
LibreCat
| DOI
1996 | Conference Paper | LibreCat-ID: 39902
J. Muller, G. Wirth, U. Hilleringmann, and K. Goser, “Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission,” in ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 947–950.
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1996 | Conference Paper | LibreCat-ID: 39900
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Characterization and Matching Analysis of 50 nm-NMOS-Transistors,” in ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 253–256.
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