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199 Publications


2002 | Journal Article | LibreCat-ID: 39876
Otterbach, R., Ulrich Hilleringmann, T.J. Horstmann, and K. Goser. “Structures with a Minimum Feature Size of Less than 100 Nm in CVD-Diamond for Sensor Applications.” Diamond and Related Materials 10, no. 3–7 (2002): 511–14. https://doi.org/10.1016/s0925-9635(01)00373-9.
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2002 | Journal Article | LibreCat-ID: 39877
Hilleringmann, Ulrich, T. Vieregge, and J.T. Horstmann. “A Structure Definition Technique for 25 Nm Lines of Silicon and Related Materials.” Microelectronic Engineering 53, no. 1–4 (2002): 569–72. https://doi.org/10.1016/s0167-9317(00)00380-4.
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2002 | Journal Article | LibreCat-ID: 39874
Otterbach, R., and Ulrich Hilleringmann. “Reactive Ion Etching of CVD-Diamond for Piezoresistive Pressure Sensors.” Diamond and Related Materials 11, no. 3–6 (2002): 841–44. https://doi.org/10.1016/s0925-9635(01)00703-8.
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2002 | Book Chapter | LibreCat-ID: 39875
Hilleringmann, Ulrich. “Metallisierung Und Kontakte.” In Silizium-Halbleitertechnologie, 131–151. Wiesbaden: Vieweg+Teubner Verlag, 2002. https://doi.org/10.1007/978-3-322-94119-0_8.
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2000 | Conference Paper | LibreCat-ID: 39884
Hilleringmann, Ulrich, T Vieregge, and JT Horstmann. “Nanometer Scale Lateral Structures of MOS Type Layers.” In Proceedings Micro. Tec, 49–53, 2000.
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1999 | Conference Paper | LibreCat-ID: 39890
Otterbach, R., and Ulrich Hilleringmann. “High Rate CVD-Diamond Etching for High Temperature Pressure Sensor Applications.” In 29th European Solid-State Device Research Conference, 1:320–23, 1999.
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1998 | Conference Paper | LibreCat-ID: 39893
Horstmann, J.T., Ulrich Hilleringmann, and K. Goser. “Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 Nm MOS-Transistors.” In 28th European Solid-State Device Research Conference, 512–15, 1998.
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1997 | Journal Article | LibreCat-ID: 39896
Heinrich, L.M.H., J. Muller, Ulrich Hilleringmann, K.F. Goser, A. Holmes, Do-Hoon Hwang, and R. Stern. “CMOS-Compatible Organic Light-Emitting Diodes.” IEEE Transactions on Electron Devices 44, no. 8 (1997): 1249–52. https://doi.org/10.1109/16.605463.
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1996 | Conference Paper | LibreCat-ID: 39902
Muller, J., G. Wirth, Ulrich Hilleringmann, and K. Goser. “Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission.” In ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 947–50, 1996.
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1996 | Conference Paper | LibreCat-ID: 39900
Horstmann, J. T., Ulrich Hilleringmann, and K. Goser. “Characterization and Matching Analysis of 50 Nm-NMOS-Transistors.” In ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 253–56, 1996.
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