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13 Publications
2023 | Journal Article | LibreCat-ID: 58609
de los Arcos de Pedro, M. T., Awakowicz, P., Böke, M., Boysen, N., Brinkmann, R. P., Dahlmann, R., Devi, A., Eremin, D., Franke, J., Gergs, T., Jenderny, J., Kemaneci, E., Kühne, T. D., Kusmierz, S., Mussenbrock, T., Rubner, J., Trieschmann, J., Wessling, M., Xie, X., … Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films. PLASMA PROCESSES AND POLYMERS, e2300186. https://doi.org/10.1002/ppap.202300186
LibreCat
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2023 | Journal Article | LibreCat-ID: 58610
de los Arcos de Pedro, M. T., Awakowicz, P., Benedikt, J., Biskup, B., Böke, M., Boysen, N., Buschhaus, R., Dahlmann, R., Devi, A., Gergs, T., Jenderny, J., von Keudell, A., Kühne, T. D., Kusmierz, S., Müller, H., Mussenbrock, T., Trieschmann, J., Zanders, D., Zysk, F., & Grundmeier, G. (2023). PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth. PLASMA PROCESSES AND POLYMERS, e2300150. https://doi.org/10.1002/ppap.202300150
LibreCat
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2022 | Journal Article | LibreCat-ID: 34648
Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., & Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174. https://doi.org/10.1002/ppap.202100174
LibreCat
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2022 | Journal Article | LibreCat-ID: 34650
Xie, X., de los Arcos, T., & Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052. https://doi.org/10.1002/ppap.202200052
LibreCat
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2022 | Journal Article | LibreCat-ID: 35977
Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., & Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174. https://doi.org/10.1002/ppap.202100174
LibreCat
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2022 | Journal Article | LibreCat-ID: 35974
Xie, X., de los Arcos de Pedro, M. T., & Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052. https://doi.org/10.1002/ppap.202200052
LibreCat
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2018 | Journal Article | LibreCat-ID: 22838
Gebhard, M., Mitschker, F., Hoppe, C., Aghaee, M., Rogalla, D., Creatore, M., … Devi, A. (2018). A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD. Plasma Processes and Polymers. https://doi.org/10.1002/ppap.201700209
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2018 | Journal Article | LibreCat-ID: 22839
Gebhard, M., Mitschker, F., Hoppe, C., Aghaee, M., Rogalla, D., Creatore, M., … Devi, A. (2018). A combinatorial approach to enhance barrier properties of thin films on polymers: Seeding and capping of PECVD thin films by PEALD. Plasma Processes and Polymers. https://doi.org/10.1002/ppap.201700209
LibreCat
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2018 | Journal Article | LibreCat-ID: 22547
Budde, M., Corbella, C., Große-Kreul, S., de los Arcos de Pedro, M. T., Grundmeier, G., & von Keudell, A. (2018). Decoupling of ion- and photon-activation mechanisms in polymer surfaces exposed to low-temperature plasmas. Plasma Processes and Polymers, Article 1700230. https://doi.org/10.1002/ppap.201700230
LibreCat
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2015 | Journal Article | LibreCat-ID: 22579
Grundmeier, G., von Keudell, A., & de los Arcos de Pedro, M. T. (2015). Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces. Plasma Processes and Polymers, 926–940. https://doi.org/10.1002/ppap.201500087
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2015 | Journal Article | LibreCat-ID: 22582
Mitschker, F., Dietrich, J., Ozkaya, B., de los Arcos de Pedro, M. T., Giner, I., Awakowicz, P., & Grundmeier, G. (2015). Spectroscopic and Microscopic Investigations of Degradation Processes in Polymer Surface-Near Regions During the Deposition of SiOx Films. Plasma Processes and Polymers, 1002–1009. https://doi.org/10.1002/ppap.201500085
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2013 | Journal Article | LibreCat-ID: 22592
Rügner, K., Reuter, R., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., & Benedikt, J. (2013). Insight into the Reaction Scheme of SiO2 Film Deposition at Atmospheric Pressure. Plasma Processes and Polymers, 1061–1073. https://doi.org/10.1002/ppap.201300059
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2012 | Journal Article | LibreCat-ID: 22604
Reuter, R., Rügner, K., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., & Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. Plasma Processes and Polymers, 1116–1124. https://doi.org/10.1002/ppap.201100146
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