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199 Publications


2002 | Journal Article | LibreCat-ID: 39876
Otterbach R, Hilleringmann U, Horstmann TJ, Goser K. Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications. Diamond and Related Materials. 2002;10(3-7):511-514. doi:10.1016/s0925-9635(01)00373-9
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2002 | Journal Article | LibreCat-ID: 39877
Hilleringmann U, Vieregge T, Horstmann JT. A structure definition technique for 25 nm lines of silicon and related materials. Microelectronic Engineering. 2002;53(1-4):569-572. doi:10.1016/s0167-9317(00)00380-4
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2002 | Journal Article | LibreCat-ID: 39874
Otterbach R, Hilleringmann U. Reactive ion etching of CVD-diamond for piezoresistive pressure sensors. Diamond and Related Materials. 2002;11(3-6):841-844. doi:10.1016/s0925-9635(01)00703-8
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2002 | Book Chapter | LibreCat-ID: 39875
Hilleringmann U. Metallisierung und Kontakte. In: Silizium-Halbleitertechnologie. Vieweg+Teubner Verlag; 2002:131–151. doi:10.1007/978-3-322-94119-0_8
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2000 | Conference Paper | LibreCat-ID: 39884
Hilleringmann U, Vieregge T, Horstmann J. Nanometer Scale Lateral Structures of MOS Type Layers. In: Proceedings Micro. Tec. ; 2000:49–53.
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1999 | Conference Paper | LibreCat-ID: 39890
Otterbach R, Hilleringmann U. High rate CVD-diamond etching for high temperature pressure sensor applications. In: 29th European Solid-State Device Research Conference. Vol 1. ; 1999:320-323.
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1998 | Conference Paper | LibreCat-ID: 39893
Horstmann JT, Hilleringmann U, Goser K. Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 nm MOS-Transistors. In: 28th European Solid-State Device Research Conference. ; 1998:512-515.
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1997 | Journal Article | LibreCat-ID: 39896
Heinrich LMH, Muller J, Hilleringmann U, et al. CMOS-compatible organic light-emitting diodes. IEEE Transactions on Electron Devices. 1997;44(8):1249-1252. doi:10.1109/16.605463
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1996 | Conference Paper | LibreCat-ID: 39902
Muller J, Wirth G, Hilleringmann U, Goser K. Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission. In: ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference. ; 1996:947-950.
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1996 | Conference Paper | LibreCat-ID: 39900
Horstmann JT, Hilleringmann U, Goser K. Characterization and Matching Analysis of 50 nm-NMOS-Transistors. In: ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference. ; 1996:253-256.
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1996 | Conference Paper | LibreCat-ID: 39903
Horstmann J, Hilleringmann U, Goser K. ESSDERC’96, Bologna, Italy. In: Conf. Dig. Vol 253. ; 1996.
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1995 | Conference Paper | LibreCat-ID: 39905
Muller J, Mankowski V, Hilleringmann U, et al. Conjugated Polymers for CMOS Compatible Applications. In: ESSDERC ’95: Proceedings of the 25th European Solid State Device Research Conference. ; 1995:659-662.
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1994 | Conference Paper | LibreCat-ID: 39908
Hilleringmann U, Adams S, Goser K. Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. In: ESSDERC ’94: 24th European Solid State Device Research Conference. ; 1994:387-390.
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1993 | Conference Paper | LibreCat-ID: 39909
Brab E, Hilleringmann U, Schumacher K. Monolithic System Integration of Optical Devices, Photodetectors and Analog Transimpedance CMOS Amplifiers. In: ESSCIRC ’93: Nineteenth European Solid-State Circuits Conference. Vol 1. ; 1993:242-245.
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1993 | Conference Paper | LibreCat-ID: 39910
Schonstein I, Muller J, Hilleringmann U, Goser K. Hot Carrier Monitoring in NMOS Transistors by Visible Light Emission. In: ESSDERC ’93: 23rd European Solid State Device Research Conference. ; 1993:421-424.
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1993 | Conference Paper | LibreCat-ID: 39913
Hilleringmann U, Adam S, Goser K. Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results. In: ESSDtRC’93. ; 1993.
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1992 | Conference Paper | LibreCat-ID: 39917
Hilleringmann U, Adams S, Goser K. A Silicon Technology for Monolithic Integration of Optical Waveguides, Photodetectors and VLSI CMOS Circuits. In: Proceedings ISSSE’92. ; 1992:304–307.
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1992 | Conference Paper | LibreCat-ID: 39918
Adams S, Hilleringmann U, Goser K. Electrooptical coupling of waveguides and VLSI circuits integrated on one silicon chip. In: EFOC LAN. ; 1992:92–92.
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1991 | Conference Paper | LibreCat-ID: 39922
Goser K, Hilleringmann U, Rückert U. Application and implementation of neural networks in microelectronics. In: Prieto A, ed. Artificial Neural Networks. Springer Berlin Heidelberg; 1991:243–259.
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