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199 Publications


2002 | Journal Article | LibreCat-ID: 39876
R. Otterbach, U. Hilleringmann, T. J. Horstmann, and K. Goser, “Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications,” Diamond and Related Materials, vol. 10, no. 3–7, pp. 511–514, 2002, doi: 10.1016/s0925-9635(01)00373-9.
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2002 | Journal Article | LibreCat-ID: 39877
U. Hilleringmann, T. Vieregge, and J. T. Horstmann, “A structure definition technique for 25 nm lines of silicon and related materials,” Microelectronic Engineering, vol. 53, no. 1–4, pp. 569–572, 2002, doi: 10.1016/s0167-9317(00)00380-4.
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2002 | Journal Article | LibreCat-ID: 39874
R. Otterbach and U. Hilleringmann, “Reactive ion etching of CVD-diamond for piezoresistive pressure sensors,” Diamond and Related Materials, vol. 11, no. 3–6, pp. 841–844, 2002, doi: 10.1016/s0925-9635(01)00703-8.
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2002 | Book Chapter | LibreCat-ID: 39875
U. Hilleringmann, “Metallisierung und Kontakte,” in Silizium-Halbleitertechnologie, Wiesbaden: Vieweg+Teubner Verlag, 2002, pp. 131–151.
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2000 | Conference Paper | LibreCat-ID: 39884
U. Hilleringmann, T. Vieregge, and J. Horstmann, “Nanometer Scale Lateral Structures of MOS Type Layers,” in Proceedings Micro. tec, 2000, pp. 49–53.
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1999 | Conference Paper | LibreCat-ID: 39890
R. Otterbach and U. Hilleringmann, “High rate CVD-diamond etching for high temperature pressure sensor applications,” in 29th European Solid-State Device Research Conference, 1999, vol. 1, pp. 320–323.
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1998 | Conference Paper | LibreCat-ID: 39893
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 nm MOS-Transistors,” in 28th European Solid-State Device Research Conference, 1998, pp. 512–515.
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1997 | Journal Article | LibreCat-ID: 39896
L. M. H. Heinrich et al., “CMOS-compatible organic light-emitting diodes,” IEEE Transactions on Electron Devices, vol. 44, no. 8, pp. 1249–1252, 1997, doi: 10.1109/16.605463.
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1996 | Conference Paper | LibreCat-ID: 39902
J. Muller, G. Wirth, U. Hilleringmann, and K. Goser, “Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission,” in ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 947–950.
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1996 | Conference Paper | LibreCat-ID: 39900
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Characterization and Matching Analysis of 50 nm-NMOS-Transistors,” in ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 253–256.
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1996 | Conference Paper | LibreCat-ID: 39903
J. Horstmann, U. Hilleringmann, and K. Goser, “ESSDERC’96, Bologna, Italy,” in Conf. Dig, 1996, vol. 253.
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1995 | Conference Paper | LibreCat-ID: 39905
J. Muller et al., “Conjugated Polymers for CMOS Compatible Applications,” in ESSDERC ’95: Proceedings of the 25th European Solid State Device Research Conference, 1995, pp. 659–662.
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1994 | Conference Paper | LibreCat-ID: 39908
U. Hilleringmann, S. Adams, and K. Goser, “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon,” in ESSDERC ’94: 24th European Solid State Device Research Conference, 1994, pp. 387–390.
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1993 | Conference Paper | LibreCat-ID: 39909
E. Brab, U. Hilleringmann, and K. Schumacher, “Monolithic System Integration of Optical Devices, Photodetectors and Analog Transimpedance CMOS Amplifiers,” in ESSCIRC ’93: Nineteenth European Solid-State Circuits Conference, 1993, vol. 1, pp. 242–245.
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1993 | Conference Paper | LibreCat-ID: 39910
I. Schonstein, J. Muller, U. Hilleringmann, and K. Goser, “Hot Carrier Monitoring in NMOS Transistors by Visible Light Emission,” in ESSDERC ’93: 23rd European solid State Device Research Conference, 1993, pp. 421–424.
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1993 | Conference Paper | LibreCat-ID: 39913
U. Hilleringmann, S. Adam, and K. Goser, “Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results,” 1993.
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1992 | Conference Paper | LibreCat-ID: 39917
U. Hilleringmann, S. Adams, and K. Goser, “A Silicon Technology for Monolithic Integration of Optical Waveguides, Photodetectors and VLSI CMOS Circuits,” in Proceedings ISSSE’92, 1992, pp. 304–307.
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1992 | Conference Paper | LibreCat-ID: 39918
S. Adams, U. Hilleringmann, and K. Goser, “Electrooptical coupling of waveguides and VLSI circuits integrated on one silicon chip,” in EFOC LAN, 1992, pp. 92–92.
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1991 | Conference Paper | LibreCat-ID: 39922
K. Goser, U. Hilleringmann, and U. Rückert, “Application and implementation of neural networks in microelectronics,” in Artificial Neural Networks, 1991, pp. 243–259.
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