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199 Publications
2002 | Journal Article | LibreCat-ID: 39876
Otterbach, R., Hilleringmann, U., Horstmann, T. J., & Goser, K. (2002). Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications. Diamond and Related Materials, 10(3–7), 511–514. https://doi.org/10.1016/s0925-9635(01)00373-9
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| DOI
2002 | Journal Article | LibreCat-ID: 39877
Hilleringmann, U., Vieregge, T., & Horstmann, J. T. (2002). A structure definition technique for 25 nm lines of silicon and related materials. Microelectronic Engineering, 53(1–4), 569–572. https://doi.org/10.1016/s0167-9317(00)00380-4
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| DOI
2002 | Journal Article | LibreCat-ID: 39874
Otterbach, R., & Hilleringmann, U. (2002). Reactive ion etching of CVD-diamond for piezoresistive pressure sensors. Diamond and Related Materials, 11(3–6), 841–844. https://doi.org/10.1016/s0925-9635(01)00703-8
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| DOI
2002 | Book Chapter | LibreCat-ID: 39875
Hilleringmann, U. (2002). Metallisierung und Kontakte. In Silizium-Halbleitertechnologie (pp. 131–151). Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-94119-0_8
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| DOI
2000 | Conference Paper | LibreCat-ID: 39884
Hilleringmann, U., Vieregge, T., & Horstmann, J. (2000). Nanometer Scale Lateral Structures of MOS Type Layers. Proceedings Micro. Tec, 49–53.
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1999 | Conference Paper | LibreCat-ID: 39890
Otterbach, R., & Hilleringmann, U. (1999). High rate CVD-diamond etching for high temperature pressure sensor applications. 29th European Solid-State Device Research Conference, 1, 320–323.
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1998 | Conference Paper | LibreCat-ID: 39893
Horstmann, J. T., Hilleringmann, U., & Goser, K. (1998). Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 nm MOS-Transistors. 28th European Solid-State Device Research Conference, 512–515.
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1997 | Journal Article | LibreCat-ID: 39896
Heinrich, L. M. H., Muller, J., Hilleringmann, U., Goser, K. F., Holmes, A., Hwang, D.-H., & Stern, R. (1997). CMOS-compatible organic light-emitting diodes. IEEE Transactions on Electron Devices, 44(8), 1249–1252. https://doi.org/10.1109/16.605463
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| DOI
1996 | Conference Paper | LibreCat-ID: 39902
Muller, J., Wirth, G., Hilleringmann, U., & Goser, K. (1996). Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission. ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 947–950.
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1996 | Conference Paper | LibreCat-ID: 39900
Horstmann, J. T., Hilleringmann, U., & Goser, K. (1996). Characterization and Matching Analysis of 50 nm-NMOS-Transistors. ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 253–256.
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1996 | Conference Paper | LibreCat-ID: 39903
Horstmann, J., Hilleringmann, U., & Goser, K. (1996). ESSDERC’96, Bologna, Italy. Conf. Dig, 253.
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1995 | Conference Paper | LibreCat-ID: 39905
Muller, J., Mankowski, V., Hilleringmann, U., Goser, K., Holmes, A., Gelsen, O., & Stern, R. (1995). Conjugated Polymers for CMOS Compatible Applications. ESSDERC ’95: Proceedings of the 25th European Solid State Device Research Conference, 659–662.
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1994 | Conference Paper | LibreCat-ID: 39908
Hilleringmann, U., Adams, S., & Goser, K. (1994). Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. ESSDERC ’94: 24th European Solid State Device Research Conference, 387–390.
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1993 | Conference Paper | LibreCat-ID: 39909
Brab, E., Hilleringmann, U., & Schumacher, K. (1993). Monolithic System Integration of Optical Devices, Photodetectors and Analog Transimpedance CMOS Amplifiers. ESSCIRC ’93: Nineteenth European Solid-State Circuits Conference, 1, 242–245.
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1993 | Conference Paper | LibreCat-ID: 39910
Schonstein, I., Muller, J., Hilleringmann, U., & Goser, K. (1993). Hot Carrier Monitoring in NMOS Transistors by Visible Light Emission. ESSDERC ’93: 23rd European Solid State Device Research Conference, 421–424.
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1993 | Conference Paper | LibreCat-ID: 39913
Hilleringmann, U., Adam, S., & Goser, K. (1993). Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results. ESSDtRC’93.
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1992 | Conference Paper | LibreCat-ID: 39917
Hilleringmann, U., Adams, S., & Goser, K. (1992). A Silicon Technology for Monolithic Integration of Optical Waveguides, Photodetectors and VLSI CMOS Circuits. Proceedings ISSSE’92, 304–307.
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1992 | Conference Paper | LibreCat-ID: 39918
Adams, S., Hilleringmann, U., & Goser, K. (1992). Electrooptical coupling of waveguides and VLSI circuits integrated on one silicon chip. EFOC LAN, 92–92.
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1991 | Conference Paper | LibreCat-ID: 39922
Goser, K., Hilleringmann, U., & Rückert, U. (1991). Application and implementation of neural networks in microelectronics. In A. Prieto (Ed.), Artificial Neural Networks (pp. 243–259). Springer Berlin Heidelberg.
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