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18 Publications
2017 | Journal Article | LibreCat-ID: 7026
@article{Zolatanosha_Reuter_2017, title={Robust Si 3 N 4 masks for 100 nm selective area epitaxy of GaAs-based nanostructures}, volume={180}, DOI={10.1016/j.mee.2017.05.053}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Zolatanosha, Viktoryia and Reuter, Dirk}, year={2017}, pages={35–39} }
LibreCat
| DOI
2016 | Journal Article | LibreCat-ID: 3956
@article{Meyers_Vidor_Brassat_Lindner_Hilleringmann_2016, title={Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics}, volume={174}, DOI={10.1016/j.mee.2016.12.018}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Meyers, Thorsten and Vidor, Fábio F. and Brassat, Katharina and Lindner, Jörg and Hilleringmann, Ulrich}, year={2016}, pages={35–39} }
LibreCat
| Files available
| DOI
2016 | Journal Article | LibreCat-ID: 39447
@article{Meyers_Vidor_Brassat_Lindner_Hilleringmann_2016, title={Low-voltage DNTT-based thin-film transistors and inverters for flexible electronics}, volume={174}, DOI={10.1016/j.mee.2016.12.018}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Meyers, Thorsten and Vidor, Fábio F. and Brassat, Katharina and Lindner, Jörg K.N. and Hilleringmann, Ulrich}, year={2016}, pages={35–39} }
LibreCat
| DOI
2016 | Journal Article | LibreCat-ID: 39466
@article{Vidor_Meyers_Wirth_Hilleringmann_2016, title={ZnO nanoparticle thin-film transistors on flexible substrate using spray-coating technique}, volume={159}, DOI={10.1016/j.mee.2016.02.059}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Vidor, Fábio F. and Meyers, Thorsten and Wirth, Gilson I. and Hilleringmann, Ulrich}, year={2016}, pages={155–158} }
LibreCat
| DOI
2003 | Journal Article | LibreCat-ID: 8728
@article{Zankovych_Maximov_Shorubalko_Seekamp_Beck_Romanov_Reuter_Schafmeister_Wieck_Ahopelto_et al._2003, title={Nanoimprint-induced effects on electrical and optical properties of quantum well structures}, DOI={10.1016/s0167-9317(03)00074-1}, journal={Microelectronic Engineering}, author={Zankovych, S. and Maximov, I. and Shorubalko, I. and Seekamp, J. and Beck, M. and Romanov, S. and Reuter, Dirk and Schafmeister, P. and Wieck, A.D. and Ahopelto, J. and et al.}, year={2003}, pages={214–220} }
LibreCat
| DOI
2003 | Journal Article | LibreCat-ID: 39851
@article{Pannemann_Diekmann_Hilleringmann_2003, title={Nanometer scale organic thin film transistors with Pentacene}, volume={67–68}, DOI={10.1016/s0167-9317(03)00146-1}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Pannemann, Ch. and Diekmann, T. and Hilleringmann, Ulrich}, year={2003}, pages={845–852} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 8733
@article{Kähler_Kunze_Reuter_Wieck_2002, title={Quantum wire fabrication from compensating-layer GaAs–AlGaAs heterostructures}, DOI={10.1016/s0167-9317(02)00474-4}, journal={Microelectronic Engineering}, author={Kähler, D. and Kunze, U. and Reuter, Dirk and Wieck, A.D.}, year={2002}, pages={619–623} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39912
@article{Schönstein_Müller_Hilleringmann_Goser_2002, title={Characterization of submicron NMOS devices due to visible light emission}, volume={21}, DOI={10.1016/0167-9317(93)90092-j}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Schönstein, I. and Müller, J. and Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={363–366} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39914
@article{Hilleringmann_Goser_2002, title={Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon}, volume={19}, DOI={10.1016/0167-9317(92)90425-q}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={211–214} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39899
@article{Horstmann_Hilleringmann_Goser_2002, title={Characterisation of sub-100 nm-MOS-transistors processed by optical lithography and a sidewall-etchback technique}, volume={30}, DOI={10.1016/0167-9317(95)00280-4}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Horstmann, J.T. and Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={431–434} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39882
@article{Mankowski_Hilleringmann_Schumacher_2002, title={A novel insulation technique for smart power switching devices and very high voltage ICs above 10 kV}, volume={53}, DOI={10.1016/s0167-9317(00)00370-1}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Mankowski, V. and Hilleringmann, Ulrich and Schumacher, K.}, year={2002}, pages={525–528} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39879
@article{Horstmann_Hilleringmann_Goser_2002, title={1/f-Noise of sub-100 nm-MOS-transistors fabricated by a special deposition and etchback technique}, volume={53}, DOI={10.1016/s0167-9317(00)00299-9}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Horstmann, J.T. and Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={213–216} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39919
@article{Hilleringmann_Knospe_Heite_Schumacher_Goser_2002, title={A silicon based technology for monolithic integration of waveguides and VLSI CMOS circuits}, volume={15}, DOI={10.1016/0167-9317(91)90231-2}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Hilleringmann, Ulrich and Knospe, K. and Heite, C. and Schumacher, K. and Goser, K.}, year={2002}, pages={289–292} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39920
@article{Soennecken_Hilleringmann_Goser_2002, title={Floating gate structures as nonvolatile analog memory cells in 1.0μm-LOCOS-CMOS technology with PZT dielectrica}, volume={15}, DOI={10.1016/0167-9317(91)90299-s}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Soennecken, A. and Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={633–636} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39915
@article{Hilleringmann_Goser_2002, title={Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon}, volume={19}, DOI={10.1016/0167-9317(92)90425-q}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={211–214} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39916
@article{Adams_Hilleringmann_Goser_2002, title={CMOS compatible micromachining by dry silicon-etching techniques}, volume={19}, DOI={10.1016/0167-9317(92)90420-v}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Adams, S. and Hilleringmann, Ulrich and Goser, K.}, year={2002}, pages={191–194} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39889
@article{Mankowski_Hilleringmann_Schumacher_2002, title={12 kV low current cascaded light triggered switch on one silicon chip}, volume={46}, DOI={10.1016/s0167-9317(99)00122-7}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Mankowski, V. and Hilleringmann, Ulrich and Schumacher, K.}, year={2002}, pages={413–417} }
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39877
@article{Hilleringmann_Vieregge_Horstmann_2002, title={A structure definition technique for 25 nm lines of silicon and related materials}, volume={53}, DOI={10.1016/s0167-9317(00)00380-4}, number={1–4}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Hilleringmann, Ulrich and Vieregge, T. and Horstmann, J.T.}, year={2002}, pages={569–572} }
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| DOI