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199 Publications


2005 | Conference Paper | LibreCat-ID: 39834
R. Scholz et al., “Comparison between the charge carrier mobilities in pentacene OFET structures as obtained from electrical characterization and potentiometry,” in SPIE Proceedings, 2005, doi: 10.1117/12.617004.
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2004 | Book Chapter | LibreCat-ID: 39850
U. Hilleringmann, “Ätztechnik,” in Silizium-Halbleitertechnologie, Wiesbaden: Vieweg+Teubner Verlag, 2004, pp. 65–90.
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2004 | Conference Paper | LibreCat-ID: 39872
U. Hilleringmann and C. Pannemann, “Imprint structured organic thin film transistors as driving circuit in single-use sensor applications,” in Fifth International Symposium on Instrumentation and Control Technology, 2004, doi: 10.1117/12.521463.
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2004 | Conference Paper | LibreCat-ID: 39873
R. Otterbach and U. Hilleringmann, “Piezoresistive pressure sensors in CVD diamond for high-temperature applications,” in Fifth International Symposium on Instrumentation and Control Technology, 2004, doi: 10.1117/12.521928.
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2003 | Conference Paper | LibreCat-ID: 39887
U. Hilleringmann, T. Vieregge, and J. T. Horstmann, “Masking and etching of silicon and related materials for geometries down to 25 nm,” 2003, doi: 10.1109/iecon.1999.822171.
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2003 | Conference Paper | LibreCat-ID: 39888
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Matching analysis of NMOS-transistors with a channel length down to 30 nm,” 2003, doi: 10.1109/iecon.1999.822163.
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2003 | Conference Paper | LibreCat-ID: 39885
G. Wirth, U. Hilleringmann, J. T. Horstmann, and K. Goser, “Negative differential resistance in ultrashort bulk MOSFETs,” 2003, doi: 10.1109/iecon.1999.822164.
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2003 | Journal Article | LibreCat-ID: 39851
Ch. Pannemann, T. Diekmann, and U. Hilleringmann, “Nanometer scale organic thin film transistors with Pentacene,” Microelectronic Engineering, vol. 67–68, pp. 845–852, 2003, doi: 10.1016/s0167-9317(03)00146-1.
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2002 | Journal Article | LibreCat-ID: 39904
U. Hilleringmann and K. Goser, “Optoelectronic system integration on silicon: waveguides, photodetectors, and VLSI CMOS circuits on one chip,” IEEE Transactions on Electron Devices, vol. 42, no. 5, pp. 841–846, 2002, doi: 10.1109/16.381978.
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2002 | Journal Article | LibreCat-ID: 39912
I. Schönstein, J. Müller, U. Hilleringmann, and K. Goser, “Characterization of submicron NMOS devices due to visible light emission,” Microelectronic Engineering, vol. 21, no. 1–4, pp. 363–366, 2002, doi: 10.1016/0167-9317(93)90092-j.
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2002 | Journal Article | LibreCat-ID: 39914
U. Hilleringmann and K. Goser, “Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon,” Microelectronic Engineering, vol. 19, no. 1–4, pp. 211–214, 2002, doi: 10.1016/0167-9317(92)90425-q.
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2002 | Journal Article | LibreCat-ID: 39906
E. Brass, U. Hilleringmann, and K. Schumacher, “System integration of optical devices and analog CMOS amplifiers,” IEEE Journal of Solid-State Circuits, vol. 29, no. 8, pp. 1006–1010, 2002, doi: 10.1109/4.297714.
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2002 | Journal Article | LibreCat-ID: 39907
E. Brass, U. Hilleringmann, and K. Schumacher, “System integration of optical devices and analog CMOS amplifiers,” IEEE Journal of Solid-State Circuits, vol. 29, no. 8, pp. 1006–1010, 2002, doi: 10.1109/4.297714.
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2002 | Journal Article | LibreCat-ID: 39899
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Characterisation of sub-100 nm-MOS-transistors processed by optical lithography and a sidewall-etchback technique,” Microelectronic Engineering, vol. 30, no. 1–4, pp. 431–434, 2002, doi: 10.1016/0167-9317(95)00280-4.
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2002 | Journal Article | LibreCat-ID: 39925
K. Goser, U. Hilleringmann, U. Rueckert, and K. Schumacher, “VLSI technologies for artificial neural networks,” IEEE Micro, vol. 9, no. 6, pp. 28–44, 2002, doi: 10.1109/40.42985.
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2002 | Journal Article | LibreCat-ID: 39882
V. Mankowski, U. Hilleringmann, and K. Schumacher, “A novel insulation technique for smart power switching devices and very high voltage ICs above 10 kV,” Microelectronic Engineering, vol. 53, no. 1–4, pp. 525–528, 2002, doi: 10.1016/s0167-9317(00)00370-1.
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2002 | Journal Article | LibreCat-ID: 39879
J. T. Horstmann, U. Hilleringmann, and K. Goser, “1/f-Noise of sub-100 nm-MOS-transistors fabricated by a special deposition and etchback technique,” Microelectronic Engineering, vol. 53, no. 1–4, pp. 213–216, 2002, doi: 10.1016/s0167-9317(00)00299-9.
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2002 | Conference Paper | LibreCat-ID: 39880
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Noise analysis of sub-100 nm-MOS-transistors fabricated by a special deposition and etchback technique,” 2002, doi: 10.1109/iecon.2000.972560.
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2002 | Conference Paper | LibreCat-ID: 39881
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Noise analysis of sub-100 nm-MOS-transistors fabricated by a special deposition and etchback technique,” 2002, doi: 10.1109/iecon.2000.972560.
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2002 | Journal Article | LibreCat-ID: 39919
U. Hilleringmann, K. Knospe, C. Heite, K. Schumacher, and K. Goser, “A silicon based technology for monolithic integration of waveguides and VLSI CMOS circuits,” Microelectronic Engineering, vol. 15, no. 1–4, pp. 289–292, 2002, doi: 10.1016/0167-9317(91)90231-2.
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2002 | Journal Article | LibreCat-ID: 39926
K. Goser, U. Hilleringmann, U. Rueckert, and K. Schumacher, “VLSI technologies for artificial neural networks,” IEEE Micro, vol. 9, no. 6, pp. 28–44, 2002, doi: 10.1109/40.42985.
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2002 | Conference Paper | LibreCat-ID: 39892
F. Blum et al., “Nuclear radiation detectors on various type diamonds,” 2002, doi: 10.1109/iecon.1998.724097.
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2002 | Journal Article | LibreCat-ID: 39920
A. Soennecken, U. Hilleringmann, and K. Goser, “Floating gate structures as nonvolatile analog memory cells in 1.0μm-LOCOS-CMOS technology with PZT dielectrica,” Microelectronic Engineering, vol. 15, no. 1–4, pp. 633–636, 2002, doi: 10.1016/0167-9317(91)90299-s.
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2002 | Journal Article | LibreCat-ID: 39915
U. Hilleringmann and K. Goser, “Results of monolithic integration of optical waveguides, photodiodes and CMOS circuits on silicon,” Microelectronic Engineering, vol. 19, no. 1–4, pp. 211–214, 2002, doi: 10.1016/0167-9317(92)90425-q.
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2002 | Journal Article | LibreCat-ID: 39916
S. Adams, U. Hilleringmann, and K. Goser, “CMOS compatible micromachining by dry silicon-etching techniques,” Microelectronic Engineering, vol. 19, no. 1–4, pp. 191–194, 2002, doi: 10.1016/0167-9317(92)90420-v.
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2002 | Journal Article | LibreCat-ID: 39348
J. T. Horstmann, U. Hilleringmann, and K. F. Goser, “Matching analysis of deposition defined 50-nm MOSFET’s,” IEEE Transactions on Electron Devices, vol. 45, no. 1, pp. 299–306, 2002, doi: 10.1109/16.658845.
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2002 | Conference Paper | LibreCat-ID: 39923
K. Goser, U. Hilleringmann, and U. Rueckert, “Applications and implementations of neural networks in microelectronics-overview and status,” 2002, doi: 10.1109/cmpeur.1991.257442.
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2002 | Journal Article | LibreCat-ID: 39889
V. Mankowski, U. Hilleringmann, and K. Schumacher, “12 kV low current cascaded light triggered switch on one silicon chip,” Microelectronic Engineering, vol. 46, no. 1–4, pp. 413–417, 2002, doi: 10.1016/s0167-9317(99)00122-7.
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2002 | Journal Article | LibreCat-ID: 39891
J. T. Horstmann, U. Hilleringmann, and K. F. Goser, “Matching analysis of deposition defined 50-nm MOSFET’s,” IEEE Transactions on Electron Devices, vol. 45, no. 1, pp. 299–306, 2002, doi: 10.1109/16.658845.
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2002 | Journal Article | LibreCat-ID: 39886
G. Wirth, U. Hilleringmann, J. T. Horstmann, and K. Goser, “Mesoscopic transport phenomena in ultrashort channel MOSFETs,” Solid-State Electronics, vol. 43, no. 7, pp. 1245–1250, 2002, doi: 10.1016/s0038-1101(99)00060-x.
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2002 | Journal Article | LibreCat-ID: 39876
R. Otterbach, U. Hilleringmann, T. J. Horstmann, and K. Goser, “Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications,” Diamond and Related Materials, vol. 10, no. 3–7, pp. 511–514, 2002, doi: 10.1016/s0925-9635(01)00373-9.
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2002 | Journal Article | LibreCat-ID: 39877
U. Hilleringmann, T. Vieregge, and J. T. Horstmann, “A structure definition technique for 25 nm lines of silicon and related materials,” Microelectronic Engineering, vol. 53, no. 1–4, pp. 569–572, 2002, doi: 10.1016/s0167-9317(00)00380-4.
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2002 | Journal Article | LibreCat-ID: 39874
R. Otterbach and U. Hilleringmann, “Reactive ion etching of CVD-diamond for piezoresistive pressure sensors,” Diamond and Related Materials, vol. 11, no. 3–6, pp. 841–844, 2002, doi: 10.1016/s0925-9635(01)00703-8.
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2002 | Book Chapter | LibreCat-ID: 39875
U. Hilleringmann, “Metallisierung und Kontakte,” in Silizium-Halbleitertechnologie, Wiesbaden: Vieweg+Teubner Verlag, 2002, pp. 131–151.
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2000 | Conference Paper | LibreCat-ID: 39884
U. Hilleringmann, T. Vieregge, and J. Horstmann, “Nanometer Scale Lateral Structures of MOS Type Layers,” in Proceedings Micro. tec, 2000, pp. 49–53.
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1999 | Conference Paper | LibreCat-ID: 39890
R. Otterbach and U. Hilleringmann, “High rate CVD-diamond etching for high temperature pressure sensor applications,” in 29th European Solid-State Device Research Conference, 1999, vol. 1, pp. 320–323.
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1998 | Conference Paper | LibreCat-ID: 39893
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Correlation Analysis of the Statistical Electrical Parameter Fluctuations in 50 nm MOS-Transistors,” in 28th European Solid-State Device Research Conference, 1998, pp. 512–515.
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1997 | Journal Article | LibreCat-ID: 39896
L. M. H. Heinrich et al., “CMOS-compatible organic light-emitting diodes,” IEEE Transactions on Electron Devices, vol. 44, no. 8, pp. 1249–1252, 1997, doi: 10.1109/16.605463.
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1996 | Conference Paper | LibreCat-ID: 39902
J. Muller, G. Wirth, U. Hilleringmann, and K. Goser, “Analyses of Sub 1/4-Micron MOS-Transistors by Visible Light Emission,” in ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 947–950.
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1996 | Conference Paper | LibreCat-ID: 39900
J. T. Horstmann, U. Hilleringmann, and K. Goser, “Characterization and Matching Analysis of 50 nm-NMOS-Transistors,” in ESSDERC ’96: Proceedings of the 26th European Solid State Device Research Conference, 1996, pp. 253–256.
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1996 | Conference Paper | LibreCat-ID: 39903
J. Horstmann, U. Hilleringmann, and K. Goser, “ESSDERC’96, Bologna, Italy,” in Conf. Dig, 1996, vol. 253.
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1995 | Conference Paper | LibreCat-ID: 39905
J. Muller et al., “Conjugated Polymers for CMOS Compatible Applications,” in ESSDERC ’95: Proceedings of the 25th European Solid State Device Research Conference, 1995, pp. 659–662.
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1994 | Conference Paper | LibreCat-ID: 39908
U. Hilleringmann, S. Adams, and K. Goser, “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon,” in ESSDERC ’94: 24th European Solid State Device Research Conference, 1994, pp. 387–390.
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1993 | Conference Paper | LibreCat-ID: 39909
E. Brab, U. Hilleringmann, and K. Schumacher, “Monolithic System Integration of Optical Devices, Photodetectors and Analog Transimpedance CMOS Amplifiers,” in ESSCIRC ’93: Nineteenth European Solid-State Circuits Conference, 1993, vol. 1, pp. 242–245.
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1993 | Conference Paper | LibreCat-ID: 39910
I. Schonstein, J. Muller, U. Hilleringmann, and K. Goser, “Hot Carrier Monitoring in NMOS Transistors by Visible Light Emission,” in ESSDERC ’93: 23rd European solid State Device Research Conference, 1993, pp. 421–424.
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1993 | Conference Paper | LibreCat-ID: 39913
U. Hilleringmann, S. Adam, and K. Goser, “Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results,” 1993.
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1992 | Conference Paper | LibreCat-ID: 39917
U. Hilleringmann, S. Adams, and K. Goser, “A Silicon Technology for Monolithic Integration of Optical Waveguides, Photodetectors and VLSI CMOS Circuits,” in Proceedings ISSSE’92, 1992, pp. 304–307.
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1992 | Conference Paper | LibreCat-ID: 39918
S. Adams, U. Hilleringmann, and K. Goser, “Electrooptical coupling of waveguides and VLSI circuits integrated on one silicon chip,” in EFOC LAN, 1992, pp. 92–92.
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1991 | Conference Paper | LibreCat-ID: 39922
K. Goser, U. Hilleringmann, and U. Rückert, “Application and implementation of neural networks in microelectronics,” in Artificial Neural Networks, 1991, pp. 243–259.
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