Riedl, Thomas, and Jörg Lindner. “Automated SEM Image Analysis of the Sphere Diameter, Sphere-Sphere Separation, and Opening Size Distributions of Nanosphere Lithography Masks.”
Microscopy and Microanalysis, vol. 28, no. 1, Cambridge University Press (CUP), 2021, pp. 185–95, doi:
10.1017/s1431927621013866.